PROBE STATION FOR DETECTING HEAT TEMPERATURE AND VOLTAGE SIGNAL FOR A TERMOELECTRIC MODULE IN A SIMULTANEOUS WAY

摘要

The present invention provides a probe station apparatus for measuring heat and electrical characteristics of a device simultaneously, which comprises: a chamber comprising an inward storage part which is located in the inside through a chamber cover aperture formed on one surface and comprises a window; a base which is arranged in the chamber; a platform which is arranged on the base, and is arranged with a device for voltage detection, and is arranged with a platform terminal capable of detecting a voltage signal of the device; a probe unit which comprises a probe tip capable of being connected to the platform terminal with one end arranged in the chamber; a heat source which is arranged in the chamber, and can provide heat to the device in order to be able to detect the voltage signal of the device; and an infrared ray image sensing part which can acquire through the window a thermogram as to the device generated by reaction by the heat provided from the heat source as at least a part thereof is arranged in the inward storage part. And the thermogram as to the device and the voltage signal of the device are synchronized with each other in real-time.