| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a technology for efficiently attaching/removing a wire to/from a stage on which a substrate is thermally processed.SOLUTION: A wire 3 is disposed on a surface of a stage 2 on which heating treatment is performed to a substrate 90. The wire 3 is folded at the lateral side of the stage 2 to continuously traverse the surface of the stage 2 several times. Multiple hooks 41, on which the wire 3 hooks, are provided at a long member 40 disposed at a side part of the stage 2. The long member 40 is connected with a fixed part 23 fixed to the stage 2 through multiple elastic members 54. The long member 40 is biased to the lower side by the multiple elastic members 54 thereby causing the wire 3 hooking on the hooks 41 to be pulled.</p> |
