发明名称 |
OBJECT INFORMATION OBTAINING APPARATUS, PROGRAM, AND IMAGING SYSTEM |
摘要 |
The present invention relates to an object information obtaining apparatus that obtains information about a phase image of an object using information about an interference pattern produced by a shearing interferometer, the interference pattern being formed by an electromagnetic wave or electron beam passed through or reflected by the object. The apparatus includes a first obtaining unit configured to obtain information about a differential phase image of the object using the information about the interference pattern, a second obtaining unit configured to obtain information about contrast in each region of the interference pattern, a third obtaining unit configured to weight the information about the differential phase image using the information about the contrast to obtain information about a weighted differential phase image, and a fourth obtaining unit configured to integrate the information about the weighted differential phase image to obtain the information about the phase image of the object. |
申请公布号 |
US2015308967(A1) |
申请公布日期 |
2015.10.29 |
申请号 |
US201314651187 |
申请日期 |
2013.12.12 |
申请人 |
CANON KABUSHIKI KAISHA |
发明人 |
Nagai Kentaro |
分类号 |
G01N23/04;G01N23/20;H01J37/252 |
主分类号 |
G01N23/04 |
代理机构 |
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代理人 |
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主权项 |
1. An object information obtaining apparatus that obtains information about a phase image of an object using information about an interference pattern produced by a shearing interferometer, the interference pattern being formed by an electromagnetic wave or electron beam passed through or reflected by the object, the apparatus comprising:
a first obtaining unit configured to obtain information about a differential phase image of the object using the information about the interference pattern; a second obtaining unit configured to obtain information about contrast in each region of the interference pattern; a third obtaining unit configured to weight the information about the differential phase image using the information about the contrast to obtain information about a weighted differential phase image; and a fourth obtaining unit configured to integrate the information about the weighted differential phase image to obtain the information about the phase image of the object. |
地址 |
Ohta-ku, Tokyo JP |