发明名称 OBJECT INFORMATION OBTAINING APPARATUS, PROGRAM, AND IMAGING SYSTEM
摘要 The present invention relates to an object information obtaining apparatus that obtains information about a phase image of an object using information about an interference pattern produced by a shearing interferometer, the interference pattern being formed by an electromagnetic wave or electron beam passed through or reflected by the object. The apparatus includes a first obtaining unit configured to obtain information about a differential phase image of the object using the information about the interference pattern, a second obtaining unit configured to obtain information about contrast in each region of the interference pattern, a third obtaining unit configured to weight the information about the differential phase image using the information about the contrast to obtain information about a weighted differential phase image, and a fourth obtaining unit configured to integrate the information about the weighted differential phase image to obtain the information about the phase image of the object.
申请公布号 US2015308967(A1) 申请公布日期 2015.10.29
申请号 US201314651187 申请日期 2013.12.12
申请人 CANON KABUSHIKI KAISHA 发明人 Nagai Kentaro
分类号 G01N23/04;G01N23/20;H01J37/252 主分类号 G01N23/04
代理机构 代理人
主权项 1. An object information obtaining apparatus that obtains information about a phase image of an object using information about an interference pattern produced by a shearing interferometer, the interference pattern being formed by an electromagnetic wave or electron beam passed through or reflected by the object, the apparatus comprising: a first obtaining unit configured to obtain information about a differential phase image of the object using the information about the interference pattern; a second obtaining unit configured to obtain information about contrast in each region of the interference pattern; a third obtaining unit configured to weight the information about the differential phase image using the information about the contrast to obtain information about a weighted differential phase image; and a fourth obtaining unit configured to integrate the information about the weighted differential phase image to obtain the information about the phase image of the object.
地址 Ohta-ku, Tokyo JP