| 摘要 |
PROBLEM TO BE SOLVED: To apply a coating material to the inside of a bank formed on a substrate with a high degree of precision.SOLUTION: A first imaging part images a substrate placed on a stage. A second imaging part images the substrate placed on the stage with a field angle narrower than that of the first imaging part and a resolution higher than that of the first imaging part. A control part performs: pre-alignment processing for imaging a circular pre-alignment mark provided on the substrate using the first imaging part, and controlling a moving mechanism and a rotating mechanism based on the captured image so as to align the substrate; and, after the pre-alignment processing, fine alignment processing for imaging a circular fine alignment mark provided on the substrate using the second imaging part, and controlling the moving mechanism and the rotating mechanism based on the captured image so as to align the substrate. |
