Planar Motor System With Increased Efficiency

摘要

A planar motor system comprises a platen with a first planar motor component and a stage with a second planar motor component. The stage can move along a first cardinal axis or a second cardinal axis. The planar motor system further comprises a drive system. When the drive system is energized in a first drive configuration, it applies a first force and a second force. The first force and the second force are not parallel to any cardinal axis. A vector sum of the first force and the second force is parallel to the first cardinal axis. When the drive system is energized in a second drive configuration, it applies a third force and a fourth force. The third force and the fourth force are not parallel to any cardinal axis. A vector sum of the third force and the fourth force is parallel to the second cardinal axis.

主权项

1. A planar motor system comprising:
a platen comprising:
a planar surface; anda first planar motor component; a stage comprising a second planar motor component, wherein the stage, when driven, moves parallel to the planar surface of the platen along a first cardinal axis or along a second cardinal axis; and a drive system, wherein the drive system, when energized in a drive configuration, applies to the stage a first force and a second force, wherein:
the first force has a first force magnitude and a first force direction;the first force direction is not parallel to the first cardinal axis;the first force direction is not parallel to the second cardinal axis;the second force has a second force magnitude and a second force direction;the second force direction is not parallel to the first cardinal axis;the second force direction is not parallel to the second cardinal axis; anda vector sum of the first force and the second force is parallel to the first cardinal axis.