| 摘要 |
The purpose of the present invention is to provide a highly reliable acceleration sensor having minimal zero drift both initially and over time, even when used under poor installation conditions, while keeping production costs low. In this acceleration sensor, a weight that rotates when acceleration is applied in the z direction is positioned within a cavity that is surrounded by a supporting substrate and a cap layer. The cap layer is formed such that there is a difference in the mass per unit surface area between the two sides thereof situated to either side of the rotary shaft of the weight (see fig. 1). |
