LIQUID FEED DEVICE AND VALVE SYSTEM

摘要

According to one embodiment, a liquid feed device includes a support substrate and an intermediate member. The intermediate member is provided on the support substrate. A valve and a flow channel of fluid are formed by the intermediate member. The valve communicates with the flow channel. The valve includes an outer edge portion and a gap. The gap is provided between the outer edge portion and the support substrate. The valve is capable of opening and closing the gap by the outer edge portion being pressed and released. A configuration of the outer edge portion when projected onto a plane perpendicular to a direction of the flow channel is a protruding configuration having a curved surface. The configuration of the outer edge portion is symmetric with respect to the direction of the flow channel.