| 发明名称 |
炭化珪素単結晶の製造方法および製造装置 |
| 摘要 |
|
| 申请公布号 |
JP5799846(B2) |
申请公布日期 |
2015.10.28 |
| 申请号 |
JP20120029096 |
申请日期 |
2012.02.14 |
| 申请人 |
住友電気工業株式会社 |
发明人 |
原田 真;西口 太郎;千田 裕彦 |
| 分类号 |
C30B29/36 |
主分类号 |
C30B29/36 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
|
| 地址 |
|
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