MECHANICAL STABILIZATION AND ELECTRICAL AND HYDRAULIC ADAPTATION OF A SILICON CHIP BY CERAMICS

摘要

A pressure difference sensor includes a pressure difference measuring cell, which has a measuring cell platform with pressure contactable measuring chambers in its interior, a first mounting surface and a second mounting surface. The mounting surfaces have a variable separation under pressure loading of the measuring chambers. A first reinforcement element with a first planar reinforcement area and a second reinforcement element with a second planar reinforcement area. A deflection of the mounting surfaces due to a pressure loading of the measuring chambers is lessened by the reinforcement elements, wherein especially at least 50% of an effective stiffness K=1/(dx/dp) of the reinforcement elements connected by the pressure difference measuring cell is provided only by these connections of the reinforcement element with the measuring cell platform without additional connections between the reinforcement elements in a parallel branch, wherein x is the separation between the first mounting surface and the second mounting surface having the greatest pressure dependence dx/dp.