发明名称 CHEMICAL CLEANING EQUIPMENT LEAK REPAIR AND REINFORCEMENT METHOD
摘要 The present invention relates to a method for repairing and reinforcing a sink part of a cleaning equipment that is used to clean a semiconductor, LED and LCD. To this end, the present invention comprises; the first reinforcement step(S100) of cleaning the sink part of the cleaning equipment and reinforcing the leakage regions; the second reinforcement step(S200) of forming the lower reinforcing layer with SHT-715(SHT-715A as a subject and SHT-715B as acuring agent) on the bottom surface of the sink part; the third reinforcement step(S300) of forming the middle reinforcing layer with SHT-146(UV Filler Coat) on the upper part of the lower reinforcing layer and sidewalls of the sink part; and the fourth reinforcement step(S400) of forming the upper reinforcing layer with SHT-1500(UV Coat) on the surface of the middle reinforcing layer.
申请公布号 KR20150120679(A) 申请公布日期 2015.10.28
申请号 KR20140046590 申请日期 2014.04.18
申请人 KIM, JI WAN;PARK, KI HWAN;NIWIN CO., LTD. 发明人 KIM, JI WAN;PARK, KI HWAN
分类号 H01L21/302 主分类号 H01L21/302
代理机构 代理人
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