Induction heating apparatus and induction heating method

摘要

A semiconductor substrate thermal treatment apparatus enables excellent heating control in suppressing influence of mutual induction between induction heating coils even when the induction heating coils are arranged in the vertical direction while providing horizontal magnetic flux to susceptors. The apparatus indirectly heats wafers mounted on horizontally-arranged susceptors including induction heating coils to form alternate-current magnetic flux in a direction parallel to a mount face of the susceptor. The wafer are arranged at an outer circumferential side of the susceptor. The induction heating coils are structured with at least one main heating coil and subordinate heating coils electromagnetically coupled with the main heating coil. Inverse coupling coils inversely-coupled to the subordinate heating coils are provided to the main heating coil, and zone control means separately controls a power ratio while synchronizing frequencies and current waveforms of current to the main heating coil and adjacent subordinate heating coils.

主权项

1. An induction heating apparatus, comprising:
at least one main heating coil of a plurality of induction heating coils which are arranged at an outer circumferential side of a plurality of susceptors horizontally arranged as being laminated in the vertical direction and which are adjacently stacked along an arrangement direction of the susceptors while mount faces of the susceptors for objects to be heated and a center axis of winding are in parallel; a subordinate heating coil electromagnetically coupled with the at least one main heating coil; an inverter which matches current directions supplied to the at least one main heating coil and the subordinate heating coil which are adjacently arranged; a zone controller which separately controls a power ratio supplied to the plurality of induction heating coils which are adjacently arranged; and an inverse coupling coil connected to the at least one main heating coil in series to generate mutual inductance having a reverse polarity to mutual inductance generated at a space against the subordinate heating coil, wherein winding directions of the main heating coil against the core around which the main heating coil is wound and the subordinate heating coils against the core around which the subordinate heating coil is wound are respectively the same, and the inverse coupling coil is arranged at a rear end side of the core to which the subordinate heating coil is wound at a top end side, and provides an additive polarity against the subordinate heating coil wound on the core.