Apparatus for fabricating flat panel display, and apparatus and method for detecting quantity of static electricity thereof

摘要

A fabricating apparatus of a flat panel display device includes lift pins for lifting a substrate, a susceptor through which the lift pins pass, and a static electricity quantity detector for detecting a quantity of static electricity on the substrate by sensing when the susceptor separates from the substrate by sensing a traveled distance of the susceptor when the susceptor is separated from the substrate.

主权项

1. A fabricating apparatus of a flat panel display device, comprising:
lift pins for lifting a substrate; a susceptor through which the lift pins pass; a light emitter for transmitting light to a space between the susceptor and the substrate during descent of the susceptor; a light receiver for receiving the transmitted light; a traveled-distance sensing part for sensing the traveled distance of the susceptor; a controller for automatically determining whether the substrate is separated from the susceptor by use of a sensed traveled-distance value from the traveled-distance sensing part and a detected light amount from the light receiver, storing the sensed traveled-distance value when a detected light amount is greater than a pre-set reference light amount value, and determining a quantity of static electricity charge by linking one pre-set static electricity charge value corresponding to the stored sensed traveled-distance in a lookup table in a memory; and a display part for displaying the quantity of static electricity charge determined by the controller, for determining an application time of a radio frequency (RF) power to counter the static electricity charge.