发明名称 APPARATUS AND PROCESS FOR PRODUCING A SINGLE CRYSTAL OF SILICON
摘要 An apparatus and a process for producing a single crystal of silicon are provided. The apparatus comprises: a plate including a top side with an outer edge and an inner edge, a central opening adjoining the inner edge, and a tube extending from the central opening to beneath the bottom side of the plate; a device for metering granular silicon onto the plate; a first induction heating coil positioned above the plate, provided for melting the granular silicon deposited; and a second induction heating coil positioned beneath the plate, provided for stabilization of a melt of silicon, wherein the melt is present upon a growing single crystal of silicon. The top side of the plate consists of ceramic material and has elevations, wherein the distance between the middles of the adjacent elevations in a radial direction is not less than 2 mm and not more than 15 mm.
申请公布号 KR20150118547(A) 申请公布日期 2015.10.22
申请号 KR20150051679 申请日期 2015.04.13
申请人 SILTRONIC AG 发明人 BRENNINGER GEORG;STEIN WALDEMAR;HAEBERLEN MAIK
分类号 C30B13/08;C30B29/06 主分类号 C30B13/08
代理机构 代理人
主权项
地址