INSPECTION DEVICE AND INSPECTION METHOD

摘要

PROBLEM TO BE SOLVED: To provide a technology for suppressing the cost increase and enlargement of a device for detecting the electromagnetic wave and PL light radiated from an inspection object.SOLUTION: The inspection device 100 is a device for inspecting a solar battery 90 as a photo device. The inspection device 100 includes: an irradiation unit 12 for irradiating the solar battery 90 with pulse light LP11 emitted from a femtosecond laser 121 as a light source; an electromagnetic wave detection unit 132 for detecting an electromagnetic wave pulse LT1 emitted from the solar battery 90 in response to the irradiation with the pulse light LP11; and a PL light detection unit 14 for detecting photoluminescence light PL1 emitted by the solar battery 90 in response to the irradiation with the pulse light LP11.