| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a method of manufacturing a piezoelectric vibration piece, which enables inexpensive manufacture of the piezoelectric vibration piece suppressing the occurrence of a spurious state, by simplifying a manufacturing process.SOLUTION: A method of manufacturing a piezoelectric vibration piece includes the steps of: forming groove parts M for partitioning a portion S serving as a mesa part of the piezoelectric vibration piece, on both sides of a disc-like wafer W; pinching the wafer W between surface plates rotating in directions opposite to each other and polishing surfaces of the wafer W by supplying a polishing liquid, while rotating the wafer W; and dividing the wafer W into respective portions C turned into the piezoelectric vibration pieces, in a position in which the groove part M is formed, after polishing the wafer W until the thickness of the wafer W reaches a predetermined thickness.</p> |
