BACK END OF LINE (BEOL) LOCAL OPTIMIZATION TO IMPROVE PRODUCT PERFORMANCE

摘要

The disclosure relates to a locally optimized integrated circuit (IC) including a first portion employing one or more metal interconnects having a first metal width and/or one or more vias having a first via width, and a second portion employing one or more metal interconnects having a second metal width and/or one or more vias having a second via width, wherein the second portion comprises a critical area of the IC, and wherein the second metal width is greater than the first metal width and the second via width is greater than the first via width. A method of locally optimizing an IC includes forming the one or more metal interconnects and/or the one or more vias in the first portion of the IC, and forming the one or more metal interconnects and/or the one or the more vias in the second portion of the integrated circuit.