LASER MACHINING METHOD AND LASER MACHINING DEVICE

摘要

Laser light L is converged at an object to be processed 1 formed from quartz, so as to provide the object 1 with a modified region 7 including a plurality of modified spots S along a line to cut 5. At this time, the laser light L is relatively moved along the line 5 while irradiating the object 1, so as to form the plurality of modified spots S with a pitch of 2 μm to 9 μm along the line 5. This can optimize the pitch between the plurality of modified spots S to be formed, so as to link fractures favorably to each other between the plurality of modified spots S.

主权项

1. A laser processing method for cutting an object to be processed formed from quartz along a line to cut;
the method comprising a modified region formation step of converging laser light at the object so as to form a modified region including a plurality of modified spots in the object along the line; the modified region formation step including the step of relatively moving the laser light along the line while irradiating the object therewith so as to form the plurality of modified spots along the line; wherein the plurality of modified spots have a pitch of 2 μm to 9 μm therebetween.