| 摘要 |
A single-chip and three-axis linear magnetic sensor and a manufacturing method therefor. The sensor comprises an X-axis sensor (3), a Y-axis sensor (4), and a Z-axis sensor (5). The X-axis sensor (3) comprises a reference bridge and at least two X-magnetic flux controllers (8), the Y-axis sensor (4) comprises a push-pull bridge and at least two Y-magnetic flux controllers (23, 24), and the Z-axis sensor (5) comprises a push-pull bridge and at least two Z-magnetic flux controllers (10). The arms of the reference bridge and the push-pull bridges are each formed by one or more magneto-resistive sensing components (13, 14, 15, 16) that are electrically connected, and the direction of a sensitive axis of each magneto-resistive sensing component (13, 14, 15, 16) and the magnetization direction (6) of a pinning layer are both in the X-axis direction. The manufacturing method comprises: depositing a magneto-resistive thin film on a wafer, and performing processes such as magnetic annealing, photolithography, etching, and film coating to obtain a final sensor. The single-chip and three-axis linear magnetic sensor has the advantages of being low in cost, easy to manufacture, good in linearity, high in sensitivity and the like. |
