| 摘要 |
A rubber-metal laminate gasket material, wherein a non-crystalline carbon film, for which the nanoindentation hardness on a silicon wafer is at least 10 GPa, preferably at least 15 GPa, and film thickness is at least 200 nm, preferably at least 400nm, has been formed on the outer surface of the rubber layer of a rubber-metal laminate gasket material, in which a fluorine rubber or nitrile rubber has been laminated on a metal sheet, by a plasma CVD method using an unsaturated hydrocarbon gas and supplying high frequency power from a high frequency power source. Said rubber-metal laminate gasket material reduces abrasion and attrition due to friction with the seal mating surface when used at high temperatures. |
