| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a method of manufacturing a solar battery that can enhance the yield and the economic efficiency in manufacturing of a back surface joint type solar battery.SOLUTION: A method of manufacturing a solar battery 10 in which a p-side electrode 50 and an n-side electrode 40 separated from each other through a separation groove 60 are formed on one surface of a semiconductor substrate 21, comprises a step of forming a p-type region and an n-type region on the one surface of the semiconductor substrate 21, a step of forming a ground layer 13 and a first primary conduction layer 14 on the p-type region and the n-type region, a step of forming a resist film 100 on an area corresponding to the separation group 60 of the first primary conduction layer 14, a step of forming second primary conduction layers 44b, 54b and Sn layers 45, 55 in this order by electrolytic plating while the first primary conduction layer 14 having the resist film 100 formed thereon is used as a shield layer, a step of oxidizing the surfaces of the Sn layers 45, 55 to form surface oxide films, and a step of removing the resist film 100 to etch the first primary conduction layer 14 and the ground layer 13.</p> |
