发明名称 CATALYST ADSORPTION METHOD AND CATALYST ADSORPTION DEVICE
摘要 A catalyst adsorption method can sufficiently adsorb a catalyst to a lower portion of a recess formed in a substrate. A substrate 20 in which a recess 22 is formed is prepared. Then, a catalyst 23 formed of nanoparticles coated with a dispersant is adsorbed to a surface of the substrate 20 by bringing the substrate 20 into contact with a catalyst solution 12 containing the catalyst by a catalyst adsorption device 10. At that time, a high frequency vibration is applied to the catalyst solution 12.
申请公布号 US2015303103(A1) 申请公布日期 2015.10.22
申请号 US201214343509 申请日期 2012.08.08
申请人 Shinguhara Shoso;Inoue Fumihiro;Miyake Hiroshi;Arima Ryohei;Iwashita Mitsuaki;Tanaka Takashi 发明人 Shinguhara Shoso;Inoue Fumihiro;Miyake Hiroshi;Arima Ryohei;Iwashita Mitsuaki;Tanaka Takashi
分类号 H01L21/768;C23C18/16 主分类号 H01L21/768
代理机构 代理人
主权项 1. A catalyst adsorption method comprising: preparing a substrate in which a recess is formed; and adsorbing a catalyst formed of nanoparticles coated with a dispersant to a surface of the substrate by bringing the substrate into contact with a catalyst solution containing the catalyst, wherein, in the adsorbing of the catalyst, a high frequency vibration is applied to the catalyst solution.
地址 Osaka JP