发明名称 |
CATALYST ADSORPTION METHOD AND CATALYST ADSORPTION DEVICE |
摘要 |
A catalyst adsorption method can sufficiently adsorb a catalyst to a lower portion of a recess formed in a substrate. A substrate 20 in which a recess 22 is formed is prepared. Then, a catalyst 23 formed of nanoparticles coated with a dispersant is adsorbed to a surface of the substrate 20 by bringing the substrate 20 into contact with a catalyst solution 12 containing the catalyst by a catalyst adsorption device 10. At that time, a high frequency vibration is applied to the catalyst solution 12. |
申请公布号 |
US2015303103(A1) |
申请公布日期 |
2015.10.22 |
申请号 |
US201214343509 |
申请日期 |
2012.08.08 |
申请人 |
Shinguhara Shoso;Inoue Fumihiro;Miyake Hiroshi;Arima Ryohei;Iwashita Mitsuaki;Tanaka Takashi |
发明人 |
Shinguhara Shoso;Inoue Fumihiro;Miyake Hiroshi;Arima Ryohei;Iwashita Mitsuaki;Tanaka Takashi |
分类号 |
H01L21/768;C23C18/16 |
主分类号 |
H01L21/768 |
代理机构 |
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代理人 |
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主权项 |
1. A catalyst adsorption method comprising:
preparing a substrate in which a recess is formed; and adsorbing a catalyst formed of nanoparticles coated with a dispersant to a surface of the substrate by bringing the substrate into contact with a catalyst solution containing the catalyst, wherein, in the adsorbing of the catalyst, a high frequency vibration is applied to the catalyst solution. |
地址 |
Osaka JP |