| 摘要 |
PROBLEM TO BE SOLVED: To improve mechanical strength of a lid portion or the like covering a cavity in a MEMS device provided with a function element in the cavity.SOLUTION: A MEMS device comprises: a substrate; a function element provided directly or via an insulation film on a surface of the substrate; a structure being provided on the surface of the substrate or a surface of the insulation film and forming a cavity around the function element; a first layer having an opening formed at a predetermined position and covering a part of the cavity with a gap between the first layer and the function element; a second layer being provided on a surface of the first layer and having an opening formed at a position corresponding to the predetermined position; and a sealing section being provided in a range greater than the opening of the first layer and the opening of the second layer on a surface of the second layer, and at least seals the opening of the second layer. |
