VACUUM ROBOT HAVING TYPE OF MOTOR VIBRATION ATTENUATION

摘要

The present invention relates to a technique to attenuate vibration of a motor applying a rotational force to a robot arm when the motor rotates; and to improve accuracy when the robot arm (for example, an upper arm and a lower arm) rotates and transfers a wafer. An arrangement structure of an upper motor applying the rotational force to the lower arm and a lower motor applying the rotational force to the upper arm is formed in order for the vibration in a horizontal direction be minimized such that the upper motor and the lower motor are individually rotated. Ultimately, the upper arm and the lower arm, individually rotating by interlocking with the rotational force of the upper motor and the lower motor, performs an accurate motion to transfer a wafer. According to the present invention, the vibration in the horizontal direction of the upper motor and the lower motor is attenuated such that accuracy of a rotational motion and the forward and backward linear motions of the upper arm and the lower arm can be improved.