| 摘要 |
PROBLEM TO BE SOLVED: To provide a nitrogen temperature raising unit capable of preventing the coagulation and deposition of a sublimable substance and capable of being easily installed in already-operating facilities.SOLUTION: There is provided a nitrogen temperature raising unit 1 including: a first cylindrical tube 12 into which nitrogen gas at room temperature supplied from a nitrogen gas supply unit 30 for dilution is introduced; a temperature raising container 11 that communicates with the first cylindrical tube and has a heating element 14 located on an axis of the inner space of the temperature raising container; and a second cylindrical tube 13 that communicates with the temperature raising container to discharge the temperature raised nitrogen gas. The nitrogen temperature raising unit is installed on a nitrogen gas supply path from the nitrogen gas supply unit to a dry vacuum pump 31. |
