FIXING STRUCTURE OF DIAPHRAGM, DIAPHRAGM PUMP INCLUDING THE SAME, VALVE DEVICE, AND FIXING METHOD OF DIAPHRAGM

摘要

PROBLEM TO BE SOLVED: To provide a fixing structure of a diaphragm etc. which enables reduction of the number of components and facilitates the assembly to achieve cost reduction.SOLUTION: A diaphragm 3, which divides a space 20 into a first chamber 21 and a second chamber 22, is fixed to a case 2 forming the space 20 therein by a fixing structure 4. The case 2 includes: a first frame 5 having a first recessed part 50 forming the first chamber 21 side; and a second frame 6 having a second recessed part 60 forming the second chamber 22 side. The first frame 5 and the second frame 6 are fitted to hold a peripheral part 32 of the diaphragm 3 therebetween in a compression state. The fixing structure 4 further includes a fastener 7 which fastens a first arm part 52 of the first frame 5 and a second arm part 62 of the second frame 6 from the outer side of the case 2.