发明名称 PHOTOSENSITIVE RESIN COMPOSITION AND ELECTRONIC DEVICE
摘要 PROBLEM TO BE SOLVED: To obtain a photosensitive resin composition having an excellent balance between stability with time and mechanical characteristics of a cured film.SOLUTION: The photosensitive resin composition is used for forming a permanent film and comprises an alkali-soluble resin and a photosensitive agent. A varnish prepared by dissolving the photosensitive resin composition in an organic solvent to have a 30% solid content exhibits the following properties: an initial viscosity &eegr;of the varnish at 25°C before storage and a viscosity &eegr;at 25°C after stored at 40±1°C for 7 days satisfy that &eegr;/&eegr;is 3.0 or less; and in a DSC curve obtained by use of a differential scanning calorimeter by heating from 30 to 300 under a temperature elevation rate of 10°C/min after the varnish is irradiated with g+h+i lines at a luminous energy of 300 mJ/cm, a peak temperature Tin a maximum exothermic peak is 185°C or lower.
申请公布号 JP2015184325(A) 申请公布日期 2015.10.22
申请号 JP20140058128 申请日期 2014.03.20
申请人 SUMITOMO BAKELITE CO LTD 发明人 ONISHI OSAMU
分类号 G03F7/004;C08F232/00;G03F7/023;H01L21/027 主分类号 G03F7/004
代理机构 代理人
主权项
地址