发明名称 Fluid control device
摘要 A fluid control device (101) includes a vibrating plate (141) including a first main surface and a second main surface, a driver (142) that is provided on the first main surface of the vibrating plate and vibrates the vibrating plate, and a plate (151, 451) that is provided on the second main surface of the vibrating plate and has a hole (152) provided thereon. At least one of either the vibrating plate or the plate is positioned between the hole and a region of the vibrating plate facing the hole, and includes a projection (143) projecting in a direction intermediate between the hole and the region of the vibrating plate facing the hole.
申请公布号 EP2568177(B1) 申请公布日期 2015.10.21
申请号 EP20120183361 申请日期 2012.09.06
申请人 MURATA MANUFACTURING CO., LTD.;OMRON HEALTHCARE CO., LTD. 发明人 KODAMA, YUKIHARU;HIRATA, ATSUHIKO;MAEDA, TAKENOBU;OMORI, KENTA;SANO, YOSHIHIKO
分类号 F04B43/04;F04B45/047 主分类号 F04B43/04
代理机构 代理人
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