| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a method for manufacturing a mold and a resist processing method, by which a recessed portion having a predetermined width is formed as designed even when a rugged pattern to be formed on a main surface is fine. <P>SOLUTION: The resist processing method for processing a resist pattern with recesses and projections includes a width enlarging step for a recessed portion of a resist pattern, in which a resist pattern having a width of an opening of the recessed portion smaller than a predetermined width in the resist pattern is sharpened to enlarge the width of the recessed portion in the resist pattern. The recessed portion width enlarging step includes: a first step of enlarging the width of the opening of the recessed portion in the resist pattern to be a width substantially the same as the predetermined width; and a second step of sharpening the main surface portion of the recessed portion in the resist pattern in substantially a thickness direction to allow the width of the recessed portion in the resist pattern substantially to be the same as the width of the opening. <P>COPYRIGHT: (C)2013,JPO&INPIT</p> |
