| 摘要 |
<p>To provide a simple method for evaluating reliability of a transistor, a simple test which correlates with a bias-temperature stress test (BT test) is performed instead of the BT test. Specifically, a gate current value is measured in the state where a voltage lower than the threshold voltage of an n-channel transistor whose channel region includes an oxide semiconductor is applied between a gate and a source of the transistor and a potential applied to a drain is higher than a potential applied to the gate. The evaluation of the gate current value can be simply performed compared to the case where the BT test is performed; for example, it takes short time to measure the gate current value. That is, reliability of a semiconductor device including the transistor can be easily evaluated.</p> |
