| 发明名称 | Methods for cleaning membranes used for filtering chemicals | ||
| 摘要 | A method includes performing a first cleaning step to clean a membrane, wherein during the first cleaning step, a first solvent passes through the membrane. After the first cleaning step, a second cleaning step is performed to clean the membrane. During the second cleaning step, a second solvent passes through the membrane. The first solvent and the second solvent are in different groups among three solvent groups, wherein the three solvent groups include a non-polar solvent group, a polar aprotic solvent group, and a polar protic solvent group. | ||
| 申请公布号 | US9162188(B2) | 申请公布日期 | 2015.10.20 |
| 申请号 | US201313966981 | 申请日期 | 2013.08.14 |
| 申请人 | Taiwan Semiconductor Manufacturing Company, Ltd. | 发明人 | Cheng Ya-Ling;Chang Ching-Yu |
| 分类号 | G03F7/00;B01D65/02 | 主分类号 | G03F7/00 |
| 代理机构 | Slater & Matsil, L.L.P. | 代理人 | Slater & Matsil, L.L.P. |
| 主权项 | 1. A method comprising: performing a first cleaning step to clean a membrane, wherein during the first cleaning step, a first solvent passes through the membrane; and after the first cleaning step, performing a second cleaning step to clean the membrane, wherein during the second cleaning step, a second solvent passes through the membrane, wherein the first solvent and the second solvent are in different groups among three solvent groups, and wherein the three solvent groups include a non-polar solvent group, a polar aprotic solvent group, and a polar protic solvent group. | ||
| 地址 | Hsin-Chu TW | ||