Method for producing nitride crystal

摘要

A method for producing a nitride crystal, comprising growing a nitride crystal on the surface of a seed crystal put in a reactor while the temperature and the pressure inside the reactor that contains, as put thereinto, a seed crystal having a hexagonal-system crystal structure, a nitrogen-containing solvent, a starting material, and a mineralizing agent containing fluorine and at least one halogen element selected from chlorine, bromine and iodine are so controlled that the solvent therein could be in a supercritical state and/or a subcritical state to thereby grow a nitride crystal on the surface of the seed crystal in the reactor.

主权项

1. A method for producing a gallium nitride crystal, comprising:
placing in a reactor a starting material which comprises at least one of metal gallium and a nitride including gallium; placing a seed crystal in the reactor; and growing a gallium nitride crystal on a surface of the seed crystal in a presence of a nitrogen-containing solvent and a mineralizing agent, wherein the growing of the gallium nitride crystal comprises controlling a temperature and a pressure inside the reactor such that the nitrogen-containing solvent is in a supercritical state and/or a subcritical state, the mineralizing agent includes fluorine and at least one halogen element selected from the group consisting of chlorine, bromine and iodine, when the mineralizing agent includes chlorine and fluorine, a molar concentration of chlorine is at least 5 times a molar concentration of fluorine in the mineralizing agent, when the mineralizing agent includes bromine and fluorine, a molar concentration of bromine is at least 0.5 times a molar concentration of fluorine in the mineralizing agent, and when the mineralizing agent includes iodine and fluorine, a molar concentration of iodine is at least 0.5 times a molar concentration of fluorine in the mineralizing agent.