DUAL DIAPHRAGM AND DUAL BACK PLATE ACOUSTIC APPARATUS

摘要

A microelectromechanical system (MEMS) die includes a back plate and a diaphragm assembly. The back plate includes a first back plate portion including a first electrode and a second back plate portion including a second electrode, both electrodes being integrated on a mechanical supporting layer. The diaphragm assembly includes a first diaphragm disposed proximate to and in spaced apart relation from the first back plate portion, with the first diaphragm defining an opening therethrough. The diaphragm assembly also includes a second diaphragm disposed proximate to and in spaced apart relation from the second back plate portion, the second diaphragm disposed within the opening and separated from the first diaphragm by a ring-shaped void. The diaphragm assembly also includes a connection portion connecting the first diaphragm and the second diaphragm and extending through the ring-shaped void.

主权项

1. A microelectromechanical system (MEMS) die comprising:
a back plate comprising:
a first back plate portion including a first electrode; anda second back plate portion including a second electrode; and both the first electrode and the second electrode are integrated on a mechanical supporting layer a diaphragm assembly, the diaphragm assembly comprising:
a first diaphragm disposed proximate to and in spaced apart relation from the first back plate portion, the first diaphragm defining an opening therethrough;a second diaphragm disposed proximate to and in spaced apart relation from the second back plate portion, the second diaphragm disposed within the opening and separated from the first diaphragm by a ring-shaped void; anda connection portion connecting the first diaphragm and the second diaphragm and extending through the ring-shaped void; wherein movement of the first diaphragm is effective to alter the electrical potential at the first back plate portion and not substantially alter the electrical potential at the second back plate; and wherein movement of the second diaphragm is effective to alter the electrical potential at the second back plate portion and not substantially alter the electrical potential at the first back plate.