THERMOELECTRIC CONVERSION ELEMENT

摘要

PROBLEM TO BE SOLVED: To achieve a thermoelectric conversion element having a large power factor.SOLUTION: A thermoelectric conversion element 14 has a semiconductor thermoelectric conversion laminated thin film 10 having a composite carrier supply layer 3 on a first SiGe-based high-purity layer 2. The composite carrier supply layer 3 has a second Si-based high-purity layer 4 and third Si-based high-purity layer 6, and a SiGe-based carrier supply layer 5 sandwiched by the second high-purity layer 4 and the third high-purity layer 6. The carrier supply layer 5 is a P-type carrier supply layer added with an additive of a group 13 element or an N-type carrier supply layer added with an additive of a group 15 element.