| 摘要 |
In a magnetic drive linear actuator (1), a load attachment portion (14) is fixed to the lower side portion (11B) of the rectangular tubular coil frame (11) of a mover (3), and a light-emitting portion (22) of a position detection portion (20) for detecting the movement position of the mover (3) is fixed to the upper side portion (11U) of the coil frame (11). The load attachment portion (14) and the upper side portion (11U) of the coil frame (11) are mutually coupled through beam portions (28L, 28R) bridged therebetween. This makes it possible to prevent or suppress the behaviors of the load attachment portion (14) and light-emitting portion (22) from being shifted to each other during high-acceleration driving of the mover (3), thereby improving the responsiveness and positioning accuracy of the linear actuator. |
