| 摘要 |
In order to enable increased resolution and compatibility with multiple channel image inputs without causing an increase in circuit size, an SEM device in which an image-processing system is used is configured using a scanning electron microscope (1), image-processing units (6a-6n) for processing an image obtained by image-capturing a sample (110) using the scanning electron microscope, and a display unit (151) that has a display screen for displaying the image obtained by image-capturing the sample and the results processed by the image-processing unit. The image-processing unit is configured to determine, on the basis of conditions that are set on the display screen of the display unit on which the image obtained by image-capturing the sample is displayed, a correction formula for correcting the contrast of the image displayed on the display screen, and to correct the contrast of the image using the determined correction formula. The display unit is configured to display, on the display screen, the image of the sample with which the contrast has been corrected by the image-processing unit. |
