| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To realize a compounded determination function concerning a measurement data determination method and a measurement data determination program. <P>SOLUTION: Following steps are included: a step of creating, based on an acquired image and image information acquired as necessary, plural criteria from among the delta, focus, SN, shoulder and slope value/taper width of a pattern on a sample to be measured, respectively, and registering the created criteria in a criterion table; a step of calculating, based on the acquired image and the image information acquired as necessary, measurement data corresponding to the plural criteria from among the delta, focus, SN, shoulder and slope value/taper width of the pattern on the sample, respectively; a step of determining, based on plural criteria retrieved from the criterion table, whether the calculated plural measurement data are good or not; and a step of outputting the determination result thus determined. <P>COPYRIGHT: (C)2013,JPO&INPIT</p> |
