| 摘要 |
PURPOSE:To reduce loss dependent upon support by supporting the elastic part interlocking with the vibration part through the attenuation part, which is hardly displaced, in the outline mode piezo-vibrator where the vibration part and the support part are formed into one body. CONSTITUTION:In vibrator 21, vibration part 26 and support part 25 are formed from a crystal thin plate into one body through bridge 31 by photo lithography technique, and support part 25 is provided through elastic part 30 interlocking with vibration part 26 and connection part 29 and consists of attenuation part 28, which is hardly displaced, and fixing part 27 fixed to the support material. Consequently, even if fixing part 27 is fixed strongly, characteristic is hardly affected, and energy loss is reduced. |
