| 摘要 |
<p>Conventional transfer systems for wafers, etc., transfer the transfer target from the box, through the port provided in the apparatus beforehand, to the apparatus area. Accordingly, these systems have a complex mechanism for connecting the box and port. In light of the above, under the present invention a coupling chamber corresponding to the port is formed only when the transfer box comes in tight contact with the apparatus as the transfer target in the transfer box is transferred into the apparatus, so that the transfer target will be transferred into the apparatus together with the coupling chamber, thereby simplifying the structures of the transfer box and apparatus and also allowing the transfer target to be transferred into the apparatus without fail.</p> |
