发明名称 有機発光素子の製造方法
摘要 <p>Method for manufacturing organic EL element including anode, hole injection layer, buffer layer, light-emitting layer, and cathode, layered on substrate in the stated order, and banks defining a light-emission region, and having excellent light-emission characteristics, due to the hole injection layer having excellent hole injection efficiency, being a tungsten oxide layer including an oxygen vacancy structure, formed under predetermined conditions to have an occupied energy level within a binding energy range from 1.8 eV to 3.6 eV lower than a lowest binding energy of a valence band, and after formation, subjected to atmospheric firing at a temperature within 200° C.-230° C. inclusive for a processing time of 15-45 minutes inclusive to have increased film density and improved dissolution resistance against an etching solution, a cleaning liquid, etc., used in a bank forming process.</p>
申请公布号 JP5793570(B2) 申请公布日期 2015.10.14
申请号 JP20130524519 申请日期 2011.07.15
申请人 发明人
分类号 H01L51/50;H05B33/10;H05B33/12;H05B33/22 主分类号 H01L51/50
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