ANTENNA EFFECT DISCHARGE CIRCUIT AND MANUFACTURING METHOD

摘要

An antenna effect discharge circuit is disclosed for a substrate having patterned conductors which can be exposed to environments inducing charges during a manufacturing process. The antenna effect discharge circuit has: a port which is connected to a node protected from charge accumulation on a device; a gate which is the same as a gate of a field effect transistor in the circuit; and a port through which accumulated charges can be discharged to the substrate. A capacitor connects the gate in the antenna effect discharge circuit to the substrate. A voltage supply circuit is configured to provide a voltage biasing the antenna side discharge circuit sufficiently in an off state during operation of the device. The patterned conductor in a layer of an upper part, desirably, in a layer of an uppermost part connects the gate in the antenna effect discharge circuit to the voltage supply circuit.