Component working with acoustic waves having reduced temperature coefficient of frequencies and method for producing same

摘要

A component is designed to work with acoustic waves. Embodiments have an improved temperature gradient of the frequency range and have increased performance strength. To this end, the component includes a stack of layers having a lower bonding layer, an electrode layer, an upper bonding layer, a compensation layer, and a trimming layer.

主权项

1. A component, comprising:
a piezoelectric substrate; a lower adhesion layer arranged above the substrate; an electrode layer arranged above the lower adhesion layer, the electrode layer comprising two electrodes that include comb-shaped, interdigitated electrode fingers; an upper adhesion layer arranged above the electrode fingers; a compensation layer between and covering the electrode fingers, the compensation layer configured to reduce a temperature coefficient of frequencies of the component; and a trimming layer arranged above the compensation layer, the trimming layer configured to set a desired frequency range, wherein the electrode layer comprises a layer comprising Ag and a layer comprising Cu arranged over the layer comprising Ag.