Electron microscope sample holder and sample observation method

摘要

The present invention makes it possible, even when using an ordinary electron beam device (not an environment-controlled electron beam device), to create locally a low vacuum condition in the vicinity of a sample and cool said sample by means of a sample holder alone, without modifying the device or adding equipment such as a gas cylinder. The sample to be observed is placed in a sample holder provided with: a vessel that can contain a substance to serve as a gas source; and a through-hole in the bottom of a sample mount on said vessel. Via the through-hole, gas evaporating or volatilizing from the vessel is supplied to the sample under observation, thereby creating a localized low-vacuum state at or in the vicinity of the sample. Also, the heat of vaporization required for volatilization can be used to cool the sample.

主权项

1. A sample holder for an electron microscope for radiating an electron beam on a sample that is placed in a vacuum sample chamber and taking an image of the sample, the sample holder is disposed within the vacuum chamber, the sample holder comprising,
a vessel in which a substance for a gas source is stored; a sample stage on which the sample is disposed; a communication hole to supply gas generated from the substance to the sample on the sample stage; and a first cap member covering and sealing the vessel to maintain a vacuum state having a recess portion formed on an upper side of the first cap member, wherein the sample stage is disposed in the recessed portion, wherein the first cap member has a through hole, supplying gas generated from the substance to the sample, bored through a bottom of the recess portion having a diameter smaller than an inner diameter of the recess portion and is a part of the communication, wherein a flow restriction member is disposed inside the recess portion, in the through hole, and below the sample stage, wherein a flow restriction member holder is provided for fixing the flow restriction member at a predetermined position in the recess portion, and wherein a through hole is bored through the flow restriction member through which the gas flows.