Infrared ray sensor package, infrared ray sensor module, and electronic device

摘要

According to the present invention, the gas adsorption capability of a getter can be maintained while the characteristics of an infrared ray sensor element are prevented from being deteriorated. An infrared ray sensor package has an infrared ray sensor element, a base substrate, a housing, an infrared ray transmission window, and a getter. The infrared ray sensor element is vacuum-sealed in a space surrounded by the base substrate, the housing, and the infrared ray transmission window. A spacer is disposed between the infrared ray sensor element and the base substrate to form a gap between the infrared ray sensor element and the base substrate. The getter is arranged in the gap formed between the infrared ray sensor element and the base substrate. A heat shielding member is disposed between the infrared ray sensor element and the getter. The heat shielding member is a heater for heating the infrared ray sensor element or an element formed of alloy containing Ni or heat-resistant glass.

主权项

1. An infrared ray sensor package comprising:
an infrared ray sensor element; a base substrate portion electrically connected to the infrared ray sensor element; a housing portion surrounding the infrared ray sensor element; an infrared ray transmission window, the infrared ray sensor element being vacuum-sealed in a space surrounded by the base substrate portion, the housing portion, and the infrared ray transmission window; a getter arranged in a gap between the infrared ray sensor element and the base substrate portion, wherein a cavity is formed between the getter and the base substrate; and a heat shielding member disposed between the infrared ray sensor element and the getter, the heat shielding member comprising a heater for heating the infrared ray sensor element, the heater being provided apart from the getter.