| 摘要 |
Disclosed is a temperature control system of a semiconductor manufacturing equipment using a heat exchanger capable of changing a circulation direction of a coolant. According to one aspect of the present invention, the temperature control system of the semiconductor manufacturing equipment supplies the coolant to a load by circulating the coolant collected from the load of the equipment as controlling cooling/heating of the coolant, and can change the circulation direction of the coolant. The present invention provides the temperature control system of the semiconductor manufacturing equipment using the heat exchanger capable of changing the circulation direction of the coolant includes: a coolant tank which collects the coolant from the load of the equipment, and stores the collected coolant, and includes a heater heating the stored coolant; a circulation pump which circulates the coolant stored in the coolant tank to be supplied to the load of the equipment; the heat exchanger which exchanges heat of the coolant stored in the coolant tank with cooling water; a process cooling water circulation part which supplies process cooling water; and a coolant circulation direction changing part which supplies the process cooling water through the heat exchanger; and a coolant circulation direction changing part which is connected between an output side of a coolant supply line supplying the coolant to the load of the equipment and an input side of a coolant collection line collecting the coolant from the load of the equipment, and between a first connection port and a second connection port circulating the coolant to the load of the equipment, and converts a circulation direction of the coolant supplied into the load of the equipment to a forward/backward direction. |
