MANUFACTURING METHOD OF AN ARRAY SUBSTRATE FOR LIQUID CRYSTAL DISPLAY

摘要

The present invention relates to a method for manufacturing an array substrate for a liquid crystal display device. The method includes the steps of: a) forming a gate electrode on a substrate; b) forming a gate insulation layer on the substrate including the gate electrode; c) forming a metal oxide film (an active layer) on the gate insulation layer; and d) forming a molybdenum metal film (a source/drain electrode) on the metal oxide film. The step d) includes a process for forming the molybdenum metal film on the metal oxide film and then selectively etching the molybdenum metal film by using an etching solution composition. The etching solution composition includes A) hydrogen peroxide (H_2O_2), B) one or more selected from organic acids and salts thereof, C) a cyclic amine compound, D) a phosphonic acid derivative and salt thereof, and E) water as a remainder with respect to the total weight of the composition.