| 发明名称 |
LIGHT IRRADIATING APPARATUS |
| 摘要 |
A light irradiating apparatus includes: an excimer lamp including a high voltage side electrode and a low voltage side electrode; a cooling mechanism configured to cool the high voltage side electrode using a cooling medium; and a leak current discharge circuit. The cooling mechanism includes a passage and a conductor, in which the passage allows the cooling medium to flow through, and the conductor is in contact with the cooling medium, and the conductor is electrically connected to the leak current discharge circuit. |
| 申请公布号 |
US2015287586(A1) |
申请公布日期 |
2015.10.08 |
| 申请号 |
US201514680643 |
申请日期 |
2015.04.07 |
| 申请人 |
USHIO DENKI KABUSHIKI KAISHA |
发明人 |
Inada Tadashi;Yamamori Kenji |
| 分类号 |
H01J61/52;H05B41/24;H05B41/36 |
主分类号 |
H01J61/52 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A light irradiating apparatus, comprising:
an excimer lamp including a high voltage side electrode and a low voltage side electrode; a cooling mechanism configured to cool the high voltage side electrode using a cooling medium; and a leak current discharge circuit, wherein the cooling mechanism includes a passage and a conductor, the passage allowing the cooling medium to flow through, and the conductor being in contact with the cooling medium, and the conductor is electrically connected to the leak current discharge circuit. |
| 地址 |
Tokyo JP |
