| 摘要 |
In this pressure-sensor chip, an annular diaphragm that is laid out so as to surround a differential-pressure diaphragm (1) is segmented so as to form two static-pressure diaphragms (2, 3). Using the pressure on one surface of one (2) of the static-pressure diaphragms as a baseline pressure, a measurement pressure (Pa) on one surface of the differential-pressure diaphragm (1) is divided and guided to the other surface of that static-pressure diaphragm (2). Also, using the pressure on one surface of the other static-pressure diaphragm (3) as a baseline pressure, a measurement pressure (Pb) on the other surface of the differential-pressure diaphragm (1) is divided and guided to the other surface of that static-pressure diaphragm (3). This makes it possible to provide multiple differential-pressure measurement ranges. |
