发明名称 |
COMPOSITION FOR OPTICAL IMPRINT AND METHOD FOR MANUFACTURING FILM, METHOD FOR MANUFACTURING OPTICAL COMPONENT, METHOD FOR MANUFACTURING CIRCUIT BOARD, AND METHOD FOR MANUFACTURING ELECTRONIC COMPONENT BY USE THEREOF |
摘要 |
PROBLEM TO BE SOLVED: To provide: a composition for optical imprint which enables the achievement of a high positioning accuracy and less in pattern collapse defect; and a method for manufacturing a film, a method for manufacturing an optical component, a method for manufacturing a circuit board, and a method for manufacturing an electronic component, which are arranged by use of the composition for optical imprint.SOLUTION: A composition for optical imprint comprises at least a component (A) consisting of a polymerizable compound and a component (B) consisting of a photoinitiator. The composition satisfies the following expressions (1) and (2): 0.800≤Er/Er(1); and 2.55 GPa≤Er(2). |
申请公布号 |
JP2015179807(A) |
申请公布日期 |
2015.10.08 |
申请号 |
JP20140151500 |
申请日期 |
2014.07.25 |
申请人 |
CANON INC |
发明人 |
HONMA TAKESHI;ITO TOSHIKI;KATO JUN;YONEZAWA SHIORI;KAWASAKI YOJI |
分类号 |
H01L21/027;B29C59/02;C07C43/11;C07C69/54;C07C225/22;C07C323/47;C07F9/53;C08F2/48 |
主分类号 |
H01L21/027 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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