发明名称 COMPOSITION FOR OPTICAL IMPRINT AND METHOD FOR MANUFACTURING FILM, METHOD FOR MANUFACTURING OPTICAL COMPONENT, METHOD FOR MANUFACTURING CIRCUIT BOARD, AND METHOD FOR MANUFACTURING ELECTRONIC COMPONENT BY USE THEREOF
摘要 PROBLEM TO BE SOLVED: To provide: a composition for optical imprint which enables the achievement of a high positioning accuracy and less in pattern collapse defect; and a method for manufacturing a film, a method for manufacturing an optical component, a method for manufacturing a circuit board, and a method for manufacturing an electronic component, which are arranged by use of the composition for optical imprint.SOLUTION: A composition for optical imprint comprises at least a component (A) consisting of a polymerizable compound and a component (B) consisting of a photoinitiator. The composition satisfies the following expressions (1) and (2): 0.800≤Er/Er(1); and 2.55 GPa≤Er(2).
申请公布号 JP2015179807(A) 申请公布日期 2015.10.08
申请号 JP20140151500 申请日期 2014.07.25
申请人 CANON INC 发明人 HONMA TAKESHI;ITO TOSHIKI;KATO JUN;YONEZAWA SHIORI;KAWASAKI YOJI
分类号 H01L21/027;B29C59/02;C07C43/11;C07C69/54;C07C225/22;C07C323/47;C07F9/53;C08F2/48 主分类号 H01L21/027
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