| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a substrate processing method by which a processing result of a substrate can be known from a small number of monitor substrates.SOLUTION: The substrate processing method for applying processing to a substrate while placing at least monitor substrates within a substrate holder including a plurality of slots includes: a first acquisition step of acquiring a first processing condition in first processing that is implemented while including a first number of monitor substrates, and a first processing result relating to the monitor substrates; a second acquisition step of acquiring a second processing condition in second processing that is implemented while including a second number of monitor substrates, the second number being greater than the first number, and a second processing result relating to the monitor substrates; a first calculation step of calculating a processing condition difference between the first processing condition and the second processing condition; and a second calculation step of calculating a processing result of the substrate at a slot position where no monitor substrate is mounted in the first processing, on the basis of the first processing result, the second processing result, the processing condition difference and a process model indicating relations between the processing conditions and the processing results.</p> |
