发明名称 |
SEMICONDUCTOR WAFER WEIGHING APPARATUS AND METHODS |
摘要 |
<p>A semiconductor wafer weighing apparatus comprises: a weight force measuring device for measuring a weight force of a semiconductor wafer; and control means configured to control an operation of the apparatus based on detection of acceleration of the apparatus or of a semiconductor wafer loaded on the apparatus by a detector for detecting acceleration of the apparatus or of a semiconductor wafer loaded on the apparatus; wherein: the control means is arranged to determine an error in the output of the weight force measuring device caused by an acceleration of the apparatus or of a semiconductor wafer loaded on the apparatus, using a predetermined relationship that matches the error in the output of the weight force measuring device to acceleration of the apparatus or of a semiconductor wafer loaded on the apparatus for different accelerations of the apparatus or of a semiconductor wafer loaded on the apparatus.</p> |
申请公布号 |
WO2015150733(A1) |
申请公布日期 |
2015.10.08 |
申请号 |
WO2015GB50851 |
申请日期 |
2015.03.23 |
申请人 |
METRYX LIMITED |
发明人 |
WILBY, ROBERT JOHN;KIERMASZ, ADRIAN |
分类号 |
G01G17/00;G01G23/10;H01L21/67 |
主分类号 |
G01G17/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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